MICROFABRICATION OF EPITAXIAL La 1− x (Sr,Ca) x MnO 3 IR BOLOMETER ON Si
Self supported free standing heteroepitaxial La 1− x (Sr,Ca) x MnO 3 (LSCMO) membranes grown on Bi 4 Ti 3 O 12 (BTO)/CeO 2 /YSZ buffered Si substrates have been microfabricated by Ar ion beam etching (IBE) and SF 6 /C 4 F 8 inductively coupled plasma (ICP) etching technique. The electrical property of free standing membrane was compared to as-grown sample by four point measurement. These results demonstrate feasibility to use heteroepitaxial oxide film structures with conventional photoresist patterning as thermally isolated membranes for infrared microbolometers.
Keywords: Ar ion beam etching; Microfabrication; free standing membrane; manganite; photoresist; uncooled infrared bolometer
Document Type: Research Article
Affiliations: Department of Condensed Matter Physics, Royal Institute of Technology, SE-164 40, Stockholm-Kista, Sweden
Publication date: 01 January 2006
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