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Home / Integrated Ferroelectrics, Volume 61, Number 1

Processing of Chemical Solution Deposited Ca-Modified PbTiO3 Films for High Frequency Components and Dynamic Random Access Memories

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Authors: BRETOS, I.; RICOTE, J.; JIMEZ, R.; MENDIOLA, J.; CALZADA, M.

Source: Integrated Ferroelectrics, Volume 61, Number 1, Volume 61/2004, pp. 105-110(6)

Publisher: Taylor and Francis Ltd

DOI: https://doi.org/10.1080/10584580490458748

Diol-based sol-gel processes have been used for the synthesis of calcium modified lead titanate, CaxPb1 - xTiO3 (PCT), solutions with x = 0.5. Single perovskite films have been obtained on Pt/TiO2/SiO2/(100)Si substrates. Dielectric properties of the films have been measured to evaluate their applicability in dynamic random access memories (DRAMs) and high frequency (HF) components.

Keywords: Chemical solution deposition; lead titanate; memories; tunability

Document Type: Research Article

Affiliations: Inst. Ciencia de Materiales de Madrid, CSIC, Cantoblanco, Madrid, Spain

Publication date: 01 January 2004

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