Design of a Triaxial Piezoelectric Accelerometer

Authors: Huang P-S.¹; Ren T-L.¹; Lou Q-W.¹; Liu J-S.¹; Liu L-T.¹; Li Z-J.¹

Source: Integrated Ferroelectrics, Volume 56, Number 1, Volume 56/2003 , pp. 1115-1122(8)

Publisher: Taylor and Francis Ltd

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Abstract:

A monolithic MEMS triaxial accelerometer based on piezoelectric lead zirconate titanate (PZT) thin films with highly symmetric quad-beams and a seismic mass, has been designed and simulated. Theoretical and numerical models for this structure are presented. The dynamic response and the trade-off between several design considerations are discussed. Static and modal simulations with FEM (Finite Element Method) simulator have been performed to analyze the mechanical response. It shows that the sensitivities of the three axes (X, Y, Z) are respectively 27, 27, and 29 mv/g, and there is almost no transverse sensitivity for the accelerometer. Also, the device is expected to have good temperature performance.

Keywords: Piezoelectric thin-film; triaxial accelerometer; micro-sensor

Document Type: Research article

Affiliations: 1: Institute of Microelectronics, Tsinghua University, Beijing 100084, China

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