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Publisher: Taylor and Francis Ltd

Volume 29, Numbers 3-4, Numbers 3-4/July-December 2004
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Applications of “Dry” Processing in the Microelectronics Industry Using Carbon Dioxide
pp. 97-109(13)
Authors: Charles Jones; Amy Zweber; James DeYoung.; James McClain; Ruben Carbonell; Joseph DeSimone

Oxide Materials for Development of Integrated Gas Sensors—A Comprehensive Review
pp. 111-188(78)
Authors: G. Eranna; B. Joshi; D. Runthala; R. Gupta

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