The influence of pulsed laser ablation of an aluminum target on the nitrogen plasma produced by electron cyclotron resonance (ECR) microwave discharge has been studied by optical emission spectroscopy (OES) with time and space resolution. The continuous wave (CW) feature of the optical
emissions from the ECR nitrogen plasma turns to vary with time and space due to pulsed laser ablation and the expansion of the ablation-induced aluminum plume in the nitrogen plasma. The optical emissions from the nitrogen plasma increase significantly and the emission intensity of nitrogen
molecular ions is observed to be more than 20 times higher with the target being ablated in comparison to the case without target ablation. The comparison of the optical emissions from the nitrogen plasma with those from the aluminum plume indicates that the excitation enhancement of the nitrogen
plasma occurs in the region where the aluminum plume is expanding, revealing that the expansion of the aluminum plume leads to the excitation enhancement of the nitrogen plasma. Relevant mechanisms responsible for the excitation enhancement of the nitrogen plasma through hybrid processes of
ECR microwave discharge and pulsed laser ablation are also discussed.
State Key Laboratory for Advanced Photonic Materials and Devices, Department of Optical Science and Engineering, Fudan University, Shanghai 200433, P. R. China
Publication date: November 1, 2008
More about this publication?
The Society publishes the internationally recognized, peer reviewed journal, Applied Spectroscopy, which is available both in print and online. Subscriptions are included with membership or can be purchased by institutional or corporate organizations. Abstracts may be viewed free of charge. Previously published as Bulletin (Society for Applied Spectroscopy)