Grazing Angle Attenuated Total Reflection Spectroscopy: Fields at the Interface and Source of the Enhancement

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Abstract:

With the tremendous growth in the semiconductor and coatings industries, spectroscopic methods of examining extremely thin films on high refractive index substrates have become increasingly important. One infrared method for analyzing monolayers on substrates such as silicon and gold that has recently gained popularity is 'grazing' or high angle of incidence attenuated total reflection (ATR) spectroscopy. This paper investigates the directional electric field strengths and the extraordinary sensitivity achieved by using the grazing angle ATR method for analyzing monolayers on silicon substrates.

Keywords: ATR SPECTROSCOPY; ATTENUATED TOTAL REFLECTION SPECTROSCOPY; ELECTRIC FIELD STRENGTH; METAL SUBSTRATE; MONOLAYERS; SENSITIVITY ENHANCEMENT; SILICON SUBSTRATE

Document Type: Research Article

DOI: http://dx.doi.org/10.1366/000370207780807687

Affiliations: MeV Photonics, Westport, Connecticut 06880; Harrick Scientific Products, Pleasantville, New York 10570

Publication date: May 1, 2007

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