Analysis of Depth Profiling Data Obtained by Confocal Raman Microspectroscopy

Authors: Vyörykkä, J.; Paaso, J.; Tenhunen, M.; Tenhunen, J.; Iitti, H.; Vuorinen, T.; Stenius, P.

Source: Applied Spectroscopy, Volume 57, Issue 9, Pages 259A-279A and 1053-1199 (September 2003) , pp. 1123-1128(6)

Publisher: Society for Applied Spectroscopy

Key:
Free Content - Free Content
New Content - New Content
Subscribed Content - Subscribed Content
Free Trial Content - Free Trial Content

Abstract:

The nominal depth resolution achieved in confocal Raman microscopy is on the order of a few micrometers. Often, however, the depth resolution is decreased by light refraction at the sample surface. The problem can be avoided with the use of an immersion objective and index matching oils. Through this intervention the instrument point-spread function (PSF) can be assumed to be independent of the depth of focus in the sample, and spatially invariant depth profiles can be acquired. In this work the instrument PSF was determined by measuring a depth profile of a thick uniform sample and calculating the first derivative of the depth profile curve. The first-derivative method was also used to determine sample thickness. Convolution with the PSF makes it possible to simulate the behavior of the instrument with different sample functions. It is also possible to use the instrument PSF to deconvolve depth-profiling data. Deconvolution reduces the blurring effect of the instrument and increases the depth resolution. Deconvolution can also be used in analysis of the sample surface position and in layer structure analysis. In this paper we show how the convolution integral can be used with the immersion sampling technique to determine the PSF and how the sample thickness can be determined.

Keywords: CONFOCAL RAMAN; DECONVOLUTION; DEPTH PROFILING; POINT-SPREAD FUNCTION

Document Type: Research article

DOI: 10.1366/00037020360695982

The full text electronic article is available for purchase. You will be able to download the full text electronic article after payment.

$29.00 plus tax      Refund Policy

 

OR

Back to top

Key:
Free Content - Free Content
New Content - New Content
Subscribed Content - Subscribed Content
Free Trial Content - Free Trial Content
Share this item with others: These icons link to social bookmarking sites where readers can share and discover new web pages.
Page Help Click here for Page Help
Shopping cart
Tools
Sign in






Need to register?
Sign up here
Text size: A | A | A | A