Effect of Optical Interference on Borophosphosilicate Glass Profiles Obtained with a Glow Discharge Optical Emission Spectrometer

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Abstract:

We have studied the effect of optical interference on element profiles obtained with a glow discharge optical emission spectrometer (GDS). The specimens were borophosphosilicate glass films deposited on polished silicon wafers. We found that in some cases the interference is accompanied with a beat in the profile: a damping of the sinusoidal wave followed by a recovery. Profilometry showed that the depth resolution is better when the interference continues continuously without a beat. We showed by simulation that the cause of the beat came from variation of the penetration rate throughout the sputtered area.

Keywords: DEPTH PROFILE; EMISSION SPECTROSCOPY; GLOW DISCHARGES

Document Type: Research Article

DOI: http://dx.doi.org/10.1366/0003702011951911

Affiliations: 1: Central Research Laboratory, Hitachi Ltd., 1-280 Higashi-koigakubo, Kokubunji-shi, Tokyo 185-8601, Japan. 2: Semiconductor & Integrated Circuits Group, Hitachi Ltd., 20-1 Jousuihon-cho 5chome, Kodaira-shi, Tokyo 187-8588, Japan.

Publication date: March 1, 2001

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