Thermal Decomposition Analysis of Spin-Coated Films of Partly Protected Polyvinylphenol with the t -Butoxycarbonyl Group Using Time-Resolved IR

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Abstract:

Thermal decomposition of spin-coated films of partly protected polyvinylphenol with the t -butoxycalbonyl ( t BOC-PVP) group has been investigated by monitoring the intensity of the carbonyl stretching peak of the t BOC group by using temperature-variable time-resolved infrared spectroscopy (TR/IR). The temperature programming method has been used for determining the activation energy ( Ea ) of the thermal decomposition. We compared the thermal decomposition behavior of t BOC-PVP films with that of the powders and the behavior of a 22% protected t BOC-PVP film with that of a 66% protected t BOC-PVP film. It was found that the Ea of the 22% protected tBOC-PVP film is distinctively higher than the others including the result given from thermogravimetric analysis (TG). In addition, the Ea of the 22% protected t BOC-PVP film in creased up to 50 kcal/mol with the decrease of the remaining t BOC group, while the others were constant at 30 kcal/mol. Diglyme, which was used as the solvent in the 22% protected t BOC-PVP film, was residual after the temperature increased above 80 C, and the reaction velocity of the t BOC group increased in accordance with the generation of the OH group. These results suggest that the OH group, which accelerates the thermal decomposition of t BOC-PVP, is hindered by the residual solvent in the case of the 22% protected t BOC-PVP films.

Keywords: TIME-RESOLVED IR SPECTROSCOPY THERMAL DECOMPOSITION PHOTO RESIST SPIN-COATED FILM

Document Type: Research Article

DOI: http://dx.doi.org/10.1366/0003702971942033

Publication date: September 1, 1997

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