Infrared Reflectivity Determination of Alloy Composition in Al x Ga 1-x As and In x Ga 1-x As Structures

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Abstract:

Fourier transform infrared reflectance spectroscopy can be used to establish the height of the transverse optic mode peak of AlAs at 361 cm -1. The peak height is found to be linearly dependent on the aluminum content in Al x Ga 1-x As layers on GaAs substrates. Previ- ously published spectra for In x Ga 1-x As yielded a similar result for the In content, from the transverse optic mode peak of InAs at 220 cm -1. A quick and nondestructive technique is proposed for the determination of the aluminum and indium mole fraction in these structures.

Keywords: INFRARED REFLECTANCE AL X GA 1-X AS IN X GA 1-X AS ALLOY COMPOSITION

Document Type: Research Article

DOI: http://dx.doi.org/10.1366/0003702971940332

Publication date: March 1, 1997

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