Using Raman Microscopy to Detect Leaks in Micromechanical Silicon Structures
Abstract:We demonstrate the use of Raman microscopy for leak detection in hermetically sealed micromachined accelerometers. Leaks were indicated by the presence of a foreign gas, in this case oxygen, in the 70- mu m-deep cavity enclosing the accelerometer between a silicon cap and a Pyrex window. Confocal, nondiffraction-limited operation of the Raman microscope utilized the available pathlength in the sample while still rejecting most of the fluorescence from the Pyrex . Raman peak intensities were accurately determined in the presence of noise by fitting the spectra to a function that modeled the unresolved Q-branch line shapes of oxygen and nitrogen.
Document Type: Research Article
Publication date: January 1, 1997
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