Depth Profiling of Stratified Layers Using Variable-Angle ATR

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It is shown that variable-angle attenuated total reflectance Fourier transform infrared spectroscopy is a viable technique to recover depth profile information on the molecular level. A number of known step profiles are measured to determine the limits of applicability for this method. Thickness results obtained by using the internal reflection technique are compared with thickness determination with the use of a profilometer.

Keywords: Concentration profile; Depth profile; Internal reflection spectroscopy; Polarization effects; Variable-angle ATR

Document Type: Research Article


Affiliations: Department of Macromolecular Science, Case Western Reserve University, Cleveland, Ohio 44106

Publication date: August 1, 1996

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