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Silicon Substrate Microelectrode Array for Surface-Enhanced Raman Spectroscopy

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Electrode sites of a photolithographically fabricated microelectrode array have been demonstrated to function as surface-enhanced Raman Spectroscopy (SERS) microelectrodes. The 5 × 15 μm iridium electrodes on the substrate are electroplated with silver and activated by standard procedures. Working and counter-electrode functions are integrated onto the same assembly. The electrode is shown to yield adenosine and pyridine spectra at low concentrations and submilliwatt laser power.

Keywords: Instrumentation; Microelectrode; Microelectronics; Surface-enhanced Raman spectroscopy

Document Type: Research Article

DOI: http://dx.doi.org/10.1366/0003702953966028

Affiliations: 1: Department of Chemistry, University of Michigan, 930 N. University Ave., Ann Arbor, Michigan 48109-1055 2: Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, Michigan 481092122

Publication date: December 1, 1995

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