High-Resolution Quadrature Photopyroelectric Spectroscopy of a-Si:H Thin Films Deposited on Silicon Wafers

Authors: Shen, Jun1; Mandelis, Andreas1; Othonos, Andreas2; Vanniasinkam, Joseph1

Source: Applied Spectroscopy, Volume 49, Issue 6, Pages 12A-20A and 691-860 (June 1995) , pp. 819-824(6)

Publisher: Society for Applied Spectroscopy

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Abstract:

The recently developed photothermal technique of quadrature photopyroelectric spectroscopy (Q-PPES) has been applied to measurements of amorphous Si thin films deposited on crystalline Si substrates. Direct, meaningful comparisons have been made between purely optical transmission in-phase (IP-PPES) spectra, and purely thermal-wave sub-gap spectra with the use of a novel noncontacting PPES instrument to record lock-in in-phase and quadrature spectra, respectively. FT-IR transmission spectra have also been obtained for a comparison with this IP-PPES optical method. The results of the present work showed that the FT-IR method performs the worst in terms of spectral resolution of thin films and sub-bandgap defect/impurity absorptions inherent in the Si wafer substrate. The optical IP-PPES channel, however, albeit more sensitive than the FT-IR technique, fails to resolve spectra from surface films thinner than 2100 Å, but is sensitive to sub-bandgap absorptions. The thermal-wave Q-PPES channel is capable of resolving thin-film spectra well below 500 Å thick and exhibits strong signal levels from the crystalline Si sub-bandgap absorptions. Depending on the surface thin-film orientation toward, or away from, the direction of the incident radiation, the estimated minimum mean film thickness resolvable spectroscopically by Q-PPES is either 40 Å or 100 Å, respectively.

Keywords: Amorphous hydrogenated silicon thin films; FT-IR spectroscopy; Phytopyroelectric spectroscopy (PPES); Quadrature-PPES

Document Type: Research Article

DOI: http://dx.doi.org/10.1366/0003702953964624

Affiliations: 1: Photothermal and Optoelectronic Diagnostics Laboratory, Department of Mechanical Engineering, University of Toronto, Toronto, M5S 1A4, Canada 2: Ontario Laser and Lightwave Research Center, University of Toronto, Toronto, M5S 1A4, Canada

Publication date: June 1, 1995

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