Skip to main content

Characterization and Application of a Grazing Angle Objective for Quantitative Infrared Reflection Microspectroscopy

Buy Article:

$29.00 plus tax (Refund Policy)

Abstract:

A grazing angle objective on an infrared microspectrometer is studied for quantitative spectroscopy by considering the angular dependence of the incident intensity within the objective's angular aperture. The assumption that there is no angular dependence is tested by comparing the experimental reflectance of Si and KBr surfaces with the reflectance calculated by integrating the Fresnel reflection coefficient over the angular aperture under this assumption. Good agreement was found, indicating that the specular reflectance of surfaces can straightforwardly be quantitatively integrated over the angular aperture without considering nonuniform incident intensity. This quantitative approach is applied to the thickness determination of dipcoated Krytox on gold. The infrared optical constants of both materials are known, allowing the integration to be carried out. The thickness obtained is in fair agreement with the value determined by ellipsometry in the visible. Therefore, this paper illustrates a method for more quantitative use of a grazing angle objective for infrared reflectance microspectroscopy.

Keywords: Infrared; Microspectroscopy; Thin films

Document Type: Research Article

DOI: http://dx.doi.org/10.1366/0003702953963445

Affiliations: National Aeronautics and Space Administration, Lewis Research Center, Cleveland, Ohio 44135

Publication date: March 1, 1995

More about this publication?
sas/sas/1995/00000049/00000003/art00013
dcterms_title,dcterms_description,pub_keyword
6
5
20
40
5

Access Key

Free Content
Free content
New Content
New content
Open Access Content
Open access content
Subscribed Content
Subscribed content
Free Trial Content
Free trial content
Cookie Policy
X
Cookie Policy
ingentaconnect website makes use of cookies so as to keep track of data that you have filled in. I am Happy with this Find out more