Theoretical Development for Depth Profiling of Stratified Layers Using Variable-Angle ATR

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The theory allowing depth profile information to be recovered from variable-angle attenuated total reflection spectroscopy is shown for both perpendicular and parallel polarizations. The errors invoked by the necessary approximations are evaluated by comparison with exact optical simulations using dispersion theory.

Keywords: ATR spectroscopy; Infrared; Reflectance spectroscopy; Spectroscopic techniques; Surface analysis

Document Type: Research Article


Affiliations: Department of Macromolecular Science, Case Western Reserve University, Cleveland, Ohio 44106

Publication date: August 1, 1993

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