Calculation of Carbonaceous Overlayer Thickness in XPS to Yield Substrate Stoichiometries

Authors: Griffiths, Lee; Bradley, Les

Source: Applied Spectroscopy, Volume 46, Issue 9, Pages 1327-1441 (September 1992) , pp. 1426-1430(5)

Publisher: Society for Applied Spectroscopy

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Abstract:

A method has been developed which calculates the thickness of the hydrocarbon overlayer from x-ray photoemission spectroscopy (XPS) spectra. The method is specific to each sample and utilizes the relative intensity of the C 1s peak and all other peaks. Attenuations calculated with this overlayer thickness yield more accurate substrate stoichiometries. A rough-sample model is also developed which not only explains previous anomalies in the thickness of hydrocarbon overlayer calculated but is capable of yielding further accuracy in substrate stoichiometries.

Keywords: Surface analysis

Document Type: Research article

DOI: http://dx.doi.org/10.1366/0003702924123809

Affiliations: 1: ICI Chemicals & Polymers Ltd., Research & Technology Department, P.O. Box 8, The Heath, Runcorn, Cheshire, WA7 4QD, U.K.

Publication date: 1992-09-01

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