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Calculation of Carbonaceous Overlayer Thickness in XPS to Yield Substrate Stoichiometries

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A method has been developed which calculates the thickness of the hydrocarbon overlayer from x-ray photoemission spectroscopy (XPS) spectra. The method is specific to each sample and utilizes the relative intensity of the C 1s peak and all other peaks. Attenuations calculated with this overlayer thickness yield more accurate substrate stoichiometries. A rough-sample model is also developed which not only explains previous anomalies in the thickness of hydrocarbon overlayer calculated but is capable of yielding further accuracy in substrate stoichiometries.

Keywords: Surface analysis

Document Type: Research Article


Affiliations: ICI Chemicals & Polymers Ltd., Research & Technology Department, P.O. Box 8, The Heath, Runcorn, Cheshire, WA7 4QD, U.K.

Publication date: September 1, 1992

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