Detection of Trace Concentrations of Column III and V Hydrides by Laser-Induced Breakdown Spectroscopy

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The measurement of trace concentrations (1–400 ppm) of polyatomic molecular impurities in helium was investigated by laser-induced breakdown spectroscopy (LIBS). For the Column III and V hydrides such as B2 H6, PH3, and AsH3, the detectability limits with the present apparatus were determined to be 1, 3, and ∼1 ppm, respectively. It is expected that resorting to synchronous detection techniques will improve the sensitivity of LIBS for this application by as much as an order of magnitude.

Keywords: Fluorescence; Laser-induced breakdown spectroscopy; Lasers, Nd:YAG; UV-visible spectroscopy

Document Type: Research Article


Affiliations: 1: Everitt Laboratory, University of Illinois, Urbana, Illinois 61801; present address: Lightwave Electronics Corp., 897-5A Independence Avenue, Mountain View, CA 94043 2: Everitt Laboratory, University of Illinois, Urbana, Illinois 61801

Publication date: July 1, 1991

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