Automated Micro-Raman Mapping and Imaging Applied to Silicon Devices and Zirconia Ceramic Stress and Grain Boundary Morphology
Abstract:An automated, point-by-point, Raman mapping and imaging system is described that combines a 0.5-μm stepper-motor-driven stage, a Raman microscope, and a filter spectrograph with an intensified diode array detector. High-resolution Raman images of a silicon device structure and a map showing the presence of the monoclinic phase of zirconia (ZrO2) at grain boundaries and in stressed regions of a sintered tetragonally stabilized ceramic are reported. The importance of image processing is demonstrated and emphasised.
Document Type: Research Article
Affiliations: 1: Department of Chemical and Life Sciences, Newcastle upon Tyne Polytechnic, Ellison Place, Newcastle upon Tyne NE1 8ST, U.K. 2: Department of Chemical and Life Sciences, Newcastle upon Tyne Polytechnic, Ellison Place, Newcastle upon Tyne NE1 8ST, U.K.; Directorate General of Defence Quality Assurance, Royal Arsenal East, Woolwich, London SE18 6TD, U.K.
Publication date: December 1, 1990
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