Parametric Effects on Plasma Emission Produced During Excimer Laser Ablation of YBa2Cu3O7-x

$29.00 plus tax (Refund Policy)

Buy Article:

Abstract:

The effects of changes in experimental parameters on the plasma emission spectra produced during excimer laser ablation of YBa2Cu3O7 were investigated. Emission from YO is observed for low-incident laser fluences, but is absent for fluences at or above those used for thin film deposition by laser ablation. Excitation within the plasma appears to be primarily due to electron impact. The effects of incident laser fluence and ambient gas pressure on the plasma emission are distinct enough to allow adjustment of either parameter based on the observed change in the emission spectrum. Therefore, optical emission spectroscopy is well suited as a technique for in situ monitoring of the deposition of thin films by laser ablation.

Keywords: Emission spectroscopy; Laser ablation; Lasers, excimer; Mass spectrometry

Document Type: Research Article

DOI: http://dx.doi.org/10.1366/0003702904417454

Affiliations: 1: Chemistry Division, Research Department, Naval Weapons Center, China Lake, California 93555; present address: U.S. Naval Academy, Annapolis, MD 2: Chemistry Division, Research Department, Naval Weapons Center, China Lake, California 93555

Publication date: December 1, 1990

More about this publication?
Related content

Tools

Favourites

Share Content

Access Key

Free Content
Free content
New Content
New content
Open Access Content
Open access content
Subscribed Content
Subscribed content
Free Trial Content
Free trial content
Cookie Policy
X
Cookie Policy
ingentaconnect website makes use of cookies so as to keep track of data that you have filled in. I am Happy with this Find out more