Skip to main content

Spatial Distribution of Vacuum Ultraviolet Radiation in an Inductively Coupled Plasma

Buy Article:

$29.00 plus tax (Refund Policy)


Spatially resolved emission maps of an ICP as a function of torch design, power, and gas flow rate have been obtained for O, N, Cl, Br, and C in the vacuum ultraviolet with the use of an Abel inversion data reduction algorithm. Two coolant tube configurations were studied, one a standard strait coolant tube with a "bell"-style collar, and a second with a "T"-shaped sidearm tube. The studies show that the maximum emission intensities for Br and Cl occurred below the top of the coolant tube and that the N 149.28-nm emission cannot be observed for the bell collar configuration. The investigation of the T-tube configuration yielded useful information for all elements studied, with optimum observation heights ranging from 8 mm above the load coil for C at 165.70 nm to 20 mm above the load coil for O at 130.49 nm. In most cases, the maximum intensity is observed in the center of the discharge. Signal-to-noise studies indicate that the highest power practical with the minimum flow rate possible should be used for the analysis of the four nonmetals investigated.

Keywords: Emission spectroscopy; Instrumentation, emission spectroscopy

Document Type: Research Article


Affiliations: 1: University of Arizona, Department of Chemistry, Tucson, Arizona 85721; present address: Photometrics, 3440 E. Brittania Dr., Tucson, AZ 85706 2: University of Arizona, Department of Chemistry, Tucson, Arizona 85721

Publication date: September 1, 1990

More about this publication?

Access Key

Free Content
Free content
New Content
New content
Open Access Content
Open access content
Subscribed Content
Subscribed content
Free Trial Content
Free trial content
Cookie Policy
Cookie Policy
ingentaconnect website makes use of cookies so as to keep track of data that you have filled in. I am Happy with this Find out more
Real Time Web Analytics