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An Instrumental System for Simultaneous Measurement of Spatially Resolved Electron Number Densities in Plasmas

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Abstract:

An instrumental system based on a two-dimensional detector to measure electron number densities in plasmas is described. High-resolution H spectra are detected simultaneously at up to 200 spatial locations. Radially resolved electron number densities are determined, following Abel inversion and comparison of H line profiles to theoretical Stark-broadened spectra. The particular interpolation procedure used to calculate H spectra from discrete literature data can affect the calculated electron number density values. Radially and vertically resolved electron number maps for inductively coupled plasmas supported in Fassel-type and low-flow torches are presented, Electron number densities in the center of the 1.0-kW ICPs are less than 2.5 × 1014 cm−3. Short-term precision is better than 1% relative standard deviation except low in the center of the plasma, where the H intensity is low on-axis and larger off-axis.

Keywords: Emission spectroscopy; Instrumentation, emission spectroscopy; Optics; Spectroscopic techniques

Document Type: Research Article

DOI: http://dx.doi.org/10.1366/0003702894203912

Affiliations: Department of Chemistry CB#3290, Venable and Kenan Laboratories, University of North Carolina, Chapel Hill, North Carolina 27599-3290

Publication date: August 1, 1989

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