Radiative and Electrical Properties of a Planar Magnetron Glow Discharge Device

Authors: McCaig, Lori; Sacks, Richard; Lubman, David

Source: Applied Spectroscopy, Volume 43, Issue 6, Pages 899-1104 (August 1989) , pp. 912-917(6)

Publisher: Society for Applied Spectroscopy

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Abstract:

A glow discharge with a planar cathode in a curved magnetic field is described. The device relies on gradient drift, curvature drift, and electrostatic reflection of electrons to obtain high cathodic sputtering rates at unusually low voltages and pressures. Gradient drift and curvature drift of electrons occur when the magnetic field is inhomogeneous or nonlinear, respectively. The device is characterized in the pressure range from 1.0 to 0.01 Torr. Line intensities from cathodically sputtered material are highest, and continuum background intensity lowest, at pressures less than 0.06 Torr. Design features and performance data are considered.

Keywords: Emission spectroscopy; Instrumentation, emission spectroscopy; Glow discharges

Document Type: Research article

DOI: http://dx.doi.org/10.1366/0003702894203967

Affiliations: 1: Department of Chemistry, University of Michigan, Ann Arbor, Michigán 48109

Publication date: 1989-08-01

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