Spatially Resolved ESCA Using Hadamard Masks

Authors: Hoffmann, Douglas P.¹; Proctor, Andrew¹; Hercules, David M.¹

Source: Applied Spectroscopy, Volume 43, Issue 6, Pages 899-1104 (August 1989) , pp. 899-908(10)

Publisher: Society for Applied Spectroscopy

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Abstract:

Use of Hadamard-based movable masks is demonstrated to be an effective method for obtaining spatially resolved information from x-ray photoelectron spectroscopy (XPS or ESCA). The concept of such imaging in electron spectroscopy is discussed in conjunction with the results obtained from a relatively simple mask system which was attached to a modified AEI ES200 photoelectron spectrometer. Resolution on the order of 1 mm² was obtained with this configuration. The ultimate spatial resolution, on the order of microns, depends on engineering limitations concerned primarily with mask design and fabrication. The advantage of such a system stems from its inherent multiplexing nature, the requirements for only a single-channel detector, and the associated possibility of retro-fitting currently existing instrumentation.

Keywords: Hadamard imaging; ESCA imaging; ESCA

Document Type: Rapid communication

DOI: 10.1366/0003702894203903

Affiliations: 1: Department of Chemistry, University of Pittsburgh, Pittsburgh, Pennsylvania 15260