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An XPS Study of the Effects of CF4 Plasmas on Gold Surfaces

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X-ray photoelectron spectroscopy has been employed to study the effect of CF4 rf plasmas on gold surfaces. The data indicate that the CF4 plasma converts the inert gold surface into a chemically active surface composed of gold, gold oxide, and gold fluoride. Upon exposure to air, the gold fluoride is hydrolyzed. The modified surface actively adsorbs water. The significance of the results is discussed in terms of micro-electronic reliability considerations.

Keywords: CF4 plasma etching; Gold; X-ray photoelectron spectroscopy

Document Type: Research Article

DOI: http://dx.doi.org/10.1366/0003702854249899

Affiliations: Department of Chemistry, University of South Florida, Tampa, Florida 33620

Publication date: September 1, 1985

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