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X-ray photoelectron spectroscopy has been employed to study the effect of CF4 rf plasmas on gold surfaces. The data indicate that the CF4 plasma converts the inert gold surface into a chemically active surface composed of gold, gold oxide, and gold fluoride. Upon
exposure to air, the gold fluoride is hydrolyzed. The modified surface actively adsorbs water. The significance of the results is discussed in terms of micro-electronic reliability considerations.
Department of Chemistry, University of South Florida, Tampa, Florida 33620
Publication date: September 1, 1985
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The Society publishes the internationally recognized, peer reviewed journal, Applied Spectroscopy, which is available both in print and online. Subscriptions are included with membership or can be purchased by institutional or corporate organizations. Abstracts may be viewed free of charge. Previously published as Bulletin (Society for Applied Spectroscopy)