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A Review of Instrumentation Used to Generate Microwave-Induced Plasmas

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Abstract:

The development and the design of instrumentation used to generate a microwave-induced plasma (MIP) is reviewed. Microwave power generators, coupling devices, discharge tubes, and their influence on the spectrochemical utility of the MIP are described. A complete analysis of the widely used TM010 cavity is also presented.

Keywords: Emission spectroscopy; Microwave-induced plasma

Document Type: Research Article

DOI: http://dx.doi.org/10.1366/0003702844554792

Affiliations: 1: Department of Chemistry, University of South Carolina, Columbia, South Carolina 29208 2: Department of Chemistry, University of South Carolina, Columbia, South Carolina 29208; current address: Southern Research Institute, P.O. Box 55305, Birmingham, AL 35255

Publication date: November 1, 1984

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