Modification of a Plasma-Therm Inductively Coupled Plasma Supply to Enable Radio-frequency Power Modulation

Authors: Ensman, R.E.¹; Carr, J.W.¹; Hieftje, G.M.¹

Source: Applied Spectroscopy, Volume 37, Issue 6, Pages 491-575 (November/December 1983) , pp. 571-573(3)

Publisher: Society for Applied Spectroscopy

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Abstract:

A simple modification is described to enable amplitude modulation of the output of a commercial 5.0 kW inductively coupled plasma (ICP) power supply. Power modulation of an ICP might be useful in a number of practical and research situations. For example, amplitude modulation could be employed in a manner similar to optical chopping to improve signal detection efficiency in practical elemental analysis. Similarly, amplitude modulation permits the time-dependent energy flow in the plasma to be monitored.

Keywords: Emission spectroscopy; Inductively coupled plasma spectroscopy

Document Type: Research article

Affiliations: 1: Department of Chemistry, Indiana University, Bloomington, Indiana 47405

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