Determination of Carbon by dc Arc Optical Emission Spectroscopy

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Abstract:

Quantitative application of optical emission spectroscopy (OES) to analysis of thin films as a process control tool for integrated circuit manufacturing has been reported previously.

Keywords: Analysis, for carbon; Emission spectroscopy; Methods, analytical

Document Type: Short Communication

DOI: http://dx.doi.org/10.1366/0003702794925813

Affiliations: Harris Semiconductor, Division of Harris Corporation, Melbourne, Florida 32901

Publication date: May 1, 1979

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