Surface analysis techniques such as ion scattering spectroscopy (ISS) and secondary ion mass spectroscopy (SIMS) use a beam of inert ions of approximately 0.5 to 3.0 ke V energy to slowly sputter away the surface of a solid material. The energy of the scattered ion is then measured
(ISS) or the mass spectrum is recorded for the sputtered ionic species (SIMS) to provide an elemental profile analysis.
Air Force Materials Laboratory (MBM), Wright-Patterson AFB, Ohio 45433
Publication date: March 1, 1976
More about this publication?
The Society publishes the internationally recognized, peer reviewed journal, Applied Spectroscopy, which is available both in print and online. Subscriptions are included with membership or can be purchased by institutional or corporate organizations. Abstracts may be viewed free of charge. Previously published as Bulletin (Society for Applied Spectroscopy)