Electron Microbeam Probe Diagnostics on Ion Scattering Craters

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Surface analysis techniques such as ion scattering spectroscopy (ISS) and secondary ion mass spectroscopy (SIMS) use a beam of inert ions of approximately 0.5 to 3.0 ke V energy to slowly sputter away the surface of a solid material. The energy of the scattered ion is then measured (ISS) or the mass spectrum is recorded for the sputtered ionic species (SIMS) to provide an elemental profile analysis.

Keywords: Craters; Ion scattering spectroscopy; Microprobe; Secondary ion mass spectroscopy; Surfaces

Document Type: Short Communication

DOI: http://dx.doi.org/10.1366/000370276774456309

Affiliations: Air Force Materials Laboratory (MBM), Wright-Patterson AFB, Ohio 45433

Publication date: March 1, 1976

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