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Simple Programming of Ion Scattering Spectrometer for Elemental Profiling

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Abstract:

Elemental surface profiling techniques such as Auger electron spectroscopy, secondary ion mass spectroscopy, and ion scattering spectroscopy use about a 1- to 3-keV beam of ions to sputter away the surface as spectra are obtained. For a complete profile of even a thin film, many repetitive runs are necessary. In the standard commercial ion scattering spectrometer (ISS) (3M Company) the voltages to the plates of the spectrometer are increased during a scan by a motor-driven precision potentiometer. After each spectrum the potentiometer must manually be returned to zero or to the selected restart point. This procedure requires a great deal of operator attention and does not lend itself to signal averaging or digital data acquisition.

Keywords: Elemental depth profiling; Ion scattering; Surface characterization

Document Type: Short Communication

DOI: http://dx.doi.org/10.1366/000370275774456012

Affiliations: Mechanics and Surface Interactions Branch (MBM), Air Force Materials Laboratory, Wright-Patterson AFB, Ohio 45433

Publication date: May 1, 1975

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