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Spectral Interferences in Secondary Ion Mass Spectrometry

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The nature and origin of secondary ions resulting from the ion bombardment of a solid have been studied. In addition to the desired singly charged monoatomic ions, five other ion types are described in terms of their potential as spectral interferences. Except for the multiply charged ions, these interferences are molecular ions resulting from inter- and intraelement combinations. Instrumental parameters such as primary ion species, spectral polarity, and spectral resolution are shown to reduce the influence of these molecular ions.

Keywords: Ion microprobe; Mass spectrometry of solids; Secondary ion mass spectrometry; Spectral interference; high resolution

Document Type: Research Article

DOI: http://dx.doi.org/10.1366/000370273774333515

Affiliations: Materials Research Laboratory, University of Illinois, Urbana, Illinois 61801

Publication date: July 1, 1973

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