Compositional and Texture Analysis of Tantalum Thin Films by Energy Dispersive X-ray Analysis

Authors: deBen, H.S.¹; Broyde, Barret²

Source: Applied Spectroscopy, Volume 27, Issue 2, Pages 85-142 (March/April 1973) , pp. 99-102(4)

Publisher: Society for Applied Spectroscopy

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Abstract:

Quantitative measurements of concentrations are given for the phases present in undoped tantalum thin films by the use of energy-dispersive x-ray detectors. This diffraction method can also yield the extent of preferred orientation.

Keywords: X-ray diffraction; Thin films; Tantalum

Document Type: Research article

DOI: http://dx.doi.org/10.1366/000370273774333740

Affiliations: 1: Engineering Research Center, Western Electric Company, Princeton, New Jersey 08540; present address: Wharton School of Finance and Commerce, University of Pennsylvania, Philadelphia, Pa. 19104 2: Engineering Research Center, Western Electric Company, Princeton, New Jersey 08540

Publication date: 1973-03-01

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