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Spectrographic Analysis of Gold Alloys Used in Semiconductor Devices

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A quantitative spectrographic method has been developed for the determination of the following alloying constituents in gold within the concentration range 0.1 to 2.0%: Al, Sb, As, B, Ga, Ge, In, and Sn. The method utilizes a rotating-disc solution technique with internal standard control and ac spark excitation. The minimum sample requirement for a single exposure is 2.5 mg of gold alloy in a 0.25 ml solution volume. Extension of the method to include higher or lower concentration levels or other elements of interest is feasible in most cases. The accuracy of the method ranges from 5.8 to 10.7% at the 95% confidence level.

Document Type: Research Article


Affiliations: Semiconductor and Materials Division, Radio Corporation of America, Somerville, New Jersey

Publication date: April 1, 1962

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