An analysis of the nanotribological behaviour of Ti-containing hard carbon film

Authors: Roy, M.; Kvasnica, S.; Eisenmenger-Stittner, C.; Vorlaufer, G.; Pauschitz, A.

Source: Surface Engineering, Volume 21, Number 3, June 2005 , pp. 257-264(8)

Buy & download fulltext article:

Price: $48.00 plus tax (Refund Policy)

Abstract:

Diamondlike carbon (DLC) coatings are well known for their self-lubricating properties. Metal-containing DLC films exhibit reduced internal stress, improved adhesion and reduced sensitivity to humidity. Furthermore, Ti-containing DLC coatings are compatible with biological environments. In view of this, the primary aim of the present work was to evaluate and analyse the friction force behaviour of Ti-containing hard carbon films. This work is primarily intended for application to microelectromechanical systems. In order to achieve the above mentioned objective, a hard carbon layer containing 6 at.-%Ti was deposited using an unbalanced magnetron sputter system on a silicon substrate. The deposition rate of the film was monitored by a quartz microbalance. Using a stylus profilometer, the thickness of the film was found to be 1·67 ?m. The hardness and the elastic modulus of the film were determined using a nanoindenter. The hardness and the elastic modulus were determined to be 1·7 GPa and 17·7 GPa, respectively. The pull-off force, topography and friction force surface of the film were characterised with the use of an atomic force microscope. The pull-off force and the friction force were found to be 165·9 nN and 1·7 nN, respectively. The surface roughness R_a was found to be 2·65 nm. The friction coefficient was evaluated as a ratio of the friction force and the summation of the pull-off force and the normal force. Using the topography, and lateral force image, the topography induced friction force surface and the adhesion induced friction force surface were evaluated. The influences of applied loads and scan speeds on friction coefficient and various friction force surfaces are described in detail.Diamondlike carbon (DLC) coatings are well known for their self-lubricating properties. Metal-containing DLC films exhibit reduced internal stress, improved adhesion and reduced sensitivity to humidity. Furthermore, Ti-containing DLC coatings are compatible with biological environments. In view of this, the primary aim of the present work was to evaluate and analyse the friction force behaviour of Ti-containing hard carbon films. This work is primarily intended for application to microelectromechanical systems. In order to achieve the above mentioned objective, a hard carbon layer containing 6 at.-%Ti was deposited using an unbalanced magnetron sputter system on a silicon substrate. The deposition rate of the film was monitored by a quartz microbalance. Using a stylus profilometer, the thickness of the film was found to be 1·67 ?m. The hardness and the elastic modulus of the film were determined using a nanoindenter. The hardness and the elastic modulus were determined to be 1·7 GPa and 17·7 GPa, respectively. The pull-off force, topography and friction force surface of the film were characterised with the use of an atomic force microscope. The pull-off force and the friction force were found to be 165·9 nN and 1·7 nN, respectively. The surface roughness R_a was found to be 2·65 nm. The friction coefficient was evaluated as a ratio of the friction force and the summation of the pull-off force and the normal force. Using the topography, and lateral force image, the topography induced friction force surface and the adhesion induced friction force surface were evaluated. The influences of applied loads and scan speeds on friction coefficient and various friction force surfaces are described in detail.

Keywords: DLC; METAL-CONTAINING CARBON FILM; NANOTRIBOLOGY; NANOHARDNESS

Document Type: Research Article

DOI: http://dx.doi.org/10.1179/174329405X50136

Publication date: 2005-06-01

More about this publication?

Authors wishing to cite fast track papers should give the journal name and the article DOI. This will enable reference linking via CrossRef and allow forward and backward citation tracking systems to associate the fast track citation with the final journal reference.
This journal features top 10 articles which are freely available. Please click here and click on the 'Top articles' link in the right-hand menu to view the list and start downloading.
Editorial Board
Information for Authors
Subscribe to this Title
Terms & Conditions
Online submission site
ingentaconnect is not responsible for the content or availability of external websites

An analysis of the nanotribological behaviour of Ti-containing hard carbon film

Buy & download fulltext article:

Tools

Key

Text size:

Useful pages