GLOW DISCHARGE ANALYSIS ON HARD SURFACE LAYERS

Authors: Ivankovic, v.; Stupnisek, M.; Cerjan-Stefanovic, S.; Mahovic, S.

Source: Surface Engineering, Volume 13, Number 2, 1997 , pp. 165-166(2)

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Abstract:

Using by way of example an investigation of hard surface layers produced by chemical vapour deposition certain peculiarities in the use of GDS profile analysis are presented. Methods of quantification of the results are given. Of particular significance is the observation of non-uniform sputtering during the analysis.

Document Type: Research Article

Publication date: 1997-01-01

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