Optimising the angular resolution of EBSD

Authors: Brough, I.; Bate, P. S.; Humphreys, F. J.

Source: Materials Science and Technology, Volume 22, Number 11, November 2006 , pp. 1279-1286(8)

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Abstract:

The factors which determine the angular resolution in electron backscatter diffraction (EBSD), and the operating conditions which optimise it are considered. On suitable samples the angular resolution may be substantially improved by data averaging using an edge preserving Kuwahara filter. It is shown that measurements of misorientation by direct comparison of diffraction patterns can reduce the angular resolution to below 0·02°, and the application of this method to linescans and EBSD maps is discussed. It is concluded that the applicability of pattern comparison methods for EBSD maps is limited by time and microstructural considerations, but linescans using this method are shown to produce high quality data in material containing small misorientations, which cannot readily be analysed by the conventional Hough transform EBSD method.

Keywords: MAPS; EBSD; ANGULAR RESOLUTION; PATTERN COMPARISON; LINESCANS; SEM

Document Type: Research Article

DOI: http://dx.doi.org/10.1179/174328406X130902

Publication date: 2006-11-01

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