Effect of B content on thermal stability of nanocomposite Ti–B–N thin films
Authors: Lu, Y. H.; Shen, Y. G.; Zhou, Z. F.; Li, K. Y.; Chen, H.
Source: Materials Science and Technology, Volume 22, Number 10, October 2006 , pp. 1255-1260(6)
Publisher: Maney Publishing
Abstract:Ti–B–N thin films with different B contents were deposited on Si (100) at room temperature, followed by vacuum annealed at 400, 600, 800 and 1000°C for 1 h respectively. Effect of boron content on thermal stability was investigated using X-ray diffraction, scanning electron microscopy, high resolution transmission electron microscopy and nanoindentation measurements. The results indicated that incorporation of B into TiN produced a nanocomposite structure, which had a positive effect on microstructure stability. A high B content resulted in an elevated recrystallisation temperature. The hardness stability was not consistent with that of microstructure, and depended on phase configuration and composition. The films with a high as deposited hardness showed high hardness stability. Excessive or lack of amorphous phase decreased hardness stability. The residual stress value was decreased with increasing annealing temperature owing to recovery of amorphous matrix, and crystallisation of amorphous phase made its direction transform from compression to tension.
Document Type: Research Article
Publication date: 2006-10-01
Authors wishing to cite fast track papers should give the journal name and the article DOI. This will enable reference linking via CrossRef and allow forward and backward citation tracking systems to associate the fast track citation with the final journal reference.Materials Science and Technology is the successor of two previous titles, for which digitised archives are available: Metal Science (Vols. 1—17; 1967—84) and Metals Technology (Vols. 1—11; 1974—84).
- Editorial Board
- Information for Authors
- Subscribe to this Title
- Terms & Conditions
- Online submission site
- ingentaconnect is not responsible for the content or availability of external websites