Graphitization of porous 6H-SiC layers during thermal treatment in vacuum

Authors: Shuman, V.1; Savkina, N.

Source: Technical Physics Letters, Volume 30, Number 7, July 2004 , pp. 572-574(3)

Publisher: MAIK Nauka/Interperiodica

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Abstract:

We have studied the effect of thermal treatment in vacuum on the optical transmission of 6H-SiC samples with a porous layer on the Si face in the visible and near infrared spectral range. An analysis of changes in the absorption coefficient shows that the process of graphitization begins at a temperature below 70°C.

Document Type: Research article

DOI: 10.1134/1.1783405

Affiliations: 1: Email: shuman@mail.ioffe.ru

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