Preparation and Characterization of (Ba,Ca)(Ti,Zr)O3 Thin Films Through Sol-Gel Processing

Authors: Toyoda M.¹; Lubis M.Y.S.²

Source: Journal of Sol-Gel Science and Technology, Volume 16, Number 1-2, October 1999 , pp. 7-12(6)

Publisher: Springer

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Abstract:

(Ba_0.92,Ca_0.08)(Ti_0.92,Zr_0.08)O_3 thin films were prepared from Ba-Ti and Ca-Zr precursors by sol-gel processing. Polymerizable solutions containing Ba-Ti and Ca-Zr, respectively, were newly synthesized. Decomposition of the starting compounds and crystallization behavior of the film were examined by using TG/DTA and XRD. Microstructure of thin films was observed by using SEM. Polycrystalline (Ba_0.92,Ca_0.08)(Ti_0.92, Zr_0.08)O_3 films obtained by firing at 800°C were dense with fine grains. The thin films showed a dielectric constant of 1200 and dielectric loss of 0.5%.

Keywords: sol-gel; (Ba,Ca)(Ti,Zr)O; thin films; dielectric constant; dielectric loss

Language: English

Document Type: Regular paper

Affiliations: 1: Chemistry and Biology Engineering, Fukui National College of Technology, Geshi, Sabae, Fukui 916-8507, Japan. toyoda22@fukui-nct.ac.jp 2: Chemistry and Biology Engineering, Fukui National College of Technology, Geshi Sabae Fukui 916-8507, Japan

Publication date: 1999-10-01