@article {Yasuda:2010:0361-5235:1118, author = "Yasuda, K. and Niraula, M. and Oka, H. and Yoneyama, T. and Matsumoto, K. and Nakashima, H. and Nakanishi, T. and Katoh, D. and Agata, Y.", title = "Electrical Properties of Halogen-Doped CdTe Layers on Si Substrates Grown by Metalorganic Vapor-Phase Epitaxy", journal = "Journal of Electronic Materials", volume = "39", number = "7", year = "2010", abstract = "Electrical properties of halogen-doped CdTe layers grown on Si substrates using iodine and chlorine dopants are presented. No change in electrical properties of the layers was observed with chlorine as a dopant. However, doping with iodine resulted in highly conductive n-type layers or highly resistive p-type layers depending upon the growth conditions, even though a similar amount of dopant was introduced into the growth chamber. Layers grown at 560°C, with a vapor-phase Te/Cd precursor ratio of 3.0, were p-type. The resistivity of the layers remained unchanged for low dopant supply rates, but increased abruptly when the dopant supply rate was increased beyond a certain value. On the other hand, layers grown at 325°C with Te/Cd ratios from 0.1 to 0.25 were n-type. A maximum free electron concentration of 1.3 × 1017 cm−3 was obtained at room temperature. The types and conductivities of the grown layers were strongly dependent on the growth conditions.", pages = "1118-1123", url = "http://www.ingentaconnect.com/content/klu/jem/2010/00000039/00000007/00001241", doi = "doi:10.1007/s11664-010-1241-1", keyword = "CdTe epilayers, halogen doping, MOVPE, Si substrates, radiation detectors" }