Accurate Determination of the Matrix Composition Profile of Hg1-x Cd x Te by Secondary Ion Mass Spectrometry
Authors: Wang, Larry; Wang, Alice; Price, Steve
Source: Journal of Electronic Materials, Volume 36, Number 8, August 2007 , pp. 910-912(3)
Abstract:In this report, we present a new secondary ion mass spectrometry (SIMS) analysis technique to provide accurate Cd composition profiles based on the measurement of HgCs+ and CdCs+ cluster ions. Study of Hg1-x Cd x Te samples with different x values shows that x/(1 − x) is linearly proportional to HgCs+/CdCs+ over the range of x = 0.2 to x = 0.9. This technique allows us to obtain an accurate Cd profile for a multilayer HgCdTe sample with different x values for each layer using a single standard with known x value.
Document Type: Research article
Publication date: 2007-08-01