Laser Forming of Silicon Films Using Nanoparticle Precursor
Authors: Bet, Sachin; Kar, Aravinda
Source: Journal of Electronic Materials, Volume 35, Number 5, May 2006 , pp. 993-1004(12)
Abstract:Polycrystalline silicon films containing cubic silicon crystallites of size 3–4 m have been formed on nickel substrates by fusing and sintering silicon nanoparticle precursors using a laser. A mechanism for the fusion and sintering of these nanoparticles, resulting in reduced heat input and continuous film formation by surface and grain boundary diffusion, is discussed. Films were characterized by optical microscopy, scanning electron microscopy, energy-dispersive spectroscopy, and Raman spectroscopy. Films were doped with n- as well as p-type dopants by using a laser doping technique and their current–voltage (I–V) characteristics were measured.
Document Type: Regular Paper
Publication date: May 1, 2006