Toward a Better Understanding of Synthesis and Processing of Ceramic/Self-Assembled Monolayer Bilayer Coatings
Authors: Salami, T.O.; Yang, Q.; Chitre, K.; Zarembo, S.; Cho, J.; Oliver, S.R.J.
Source: Journal of Electronic Materials, Volume 34, Number 5, May 2005 , pp. 534-540(7)
Abstract:Ceramic/self-assembled monolayer (SAM) bilayer coatings can provide adequate protection for silicon devices, or act as a multipurpose coating for other electronic applications, due to synergistic effects by forming a hybrid coating structure. The organic SAM layer acts as a "template" for the growth of the ceramic layer, while the ceramic layer can provide protection from environmental and mechanical impact. Low-temperature solution-based deposition techniques, namely, an in-situ solution method (biomimetic) and a hydrothermal method, have been employed in this study. Specifically, phosphonate-based (diethyl phosphatoethyl triethoxy silane) SAMs were used as a template to generate a zirconia ceramic layer at low temperatures. Other organic templates such as –SiCl3-, –OH-, –HSO3-, or –CH3-terminated SAMs were also examined. The reactions to grow the ceramic film were found to be pH sensitive. The ceramic and SAM coatings were characterized by a variety of analytical techniques. A pathway for the formation of the ceramic coating is also discussed.
Document Type: Research Article
Publication date: May 2005