Silicon-Integrated Uncooled Infrared Detectors: Perspectives on Thin Films and Microstructures

Authors: Mehta, V.R.; Shet, S.; Ravindra, N.M.; Fiory, A.T.; Lepselter, M.P.

Source: Journal of Electronic Materials, Volume 34, Number 5, May 2005 , pp. 484-490(7)

Publisher: Springer

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Abstract:

Uncooled infrared (IR) photodetectors for telecommunications, optical processor interconnects, and focal plane arrays are advantageously integrated into systems that are silicon based through advanced thin-film technologies. This paper reviews challenges of materials, microstructures, interfaces, and reactions of thin-film materials and technologies posed by such applications.

Keywords: MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS); MICROBOLOMETERS; PHOTOCONDUCTORS; PHOTORECEIVERS; PHOTOVOLTAICS

Document Type: Research Article

Publication date: May 1, 2005

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