Preparation of Ultrasmooth and Defect-Free 4H-SiC(0001) Surfaces by Elastic Emission Machining
Authors: Kubota, Akihisa; Mimura, Hidekazu; Inagaki, Kouji; Arima, Kenta; Mori, Yuzo; Yamauchi, Kazuto
Source: Journal of Electronic Materials, Volume 34, Number 4, April 2005 , pp. 439-443(5)
Abstract:In this work, elastic emission machining (EEM), which is a precise surface-preparation technique using chemical reactions between the surfaces of work and fine powder particles, is applied to the flattening 4H-SiC (0001) surface. Prepared surfaces are observed and characterized by optical interferometry, atomic force microscopy (AFM), and low-energy electron diffraction (LEED). The obtained images show that the processed surface has atomic-level flatness, and the subsurface damage and surface scratches of the preprocessed surface are almost entirely removed.
Document Type: Research Article
Publication date: 2005-04-01