In-Situ Nanoindentation of Epitaxial TiN/MgO (001) in a Transmission Electron Microscope
Authors: Minor, A.M.; Stach, E.A.; Morris, J.W.; Petrov, I.
Source: Journal of Electronic Materials, Volume 32, Number 10, 1 October 2003 , pp. 1023-1027(5)
Abstract:The deformation behavior of the epitaxial TiN/MgO (001) thin film/substrate system was studied through in-situ nanoindentation in a transmission electron microscope (TEM). The required sample geometry was prepared using Ga+ focused ion beam (FIB) etching. During room-temperature indentation, both the TiN film and the MgO substrate deformed through the motion of dislocations. The result was a localized hemispherical plastic zone in the TiN film directly under the indentation contact area, forming an 8º tilt boundary. These results show directly that small-scale plasticity in TiN can occur at room temperature through the motion of dislocations.
Document Type: Research Article
Publication date: October 1, 2003