Performance of Molecular-Beam Epitaxy-Grown Midwave Infrared HgCdTe Detectors on Four-Inch Si Substrates and the Impact of Defects
Authors: Varesi, J.B.; Buell, A.A.; Peterson, J.M.; Bornfreund, R.E.; Vilela, M.F.; Radford, W.A.; Johnson, S.M.
Source: Journal of Electronic Materials, Volume 32, Number 7, 1 July 2003 , pp. 661-666(6)
Abstract:We are continuing development of the growth of midwave infrared (MWIR) HgCdTe by molecular-beam epitaxy (MBE) on 4-in. Si substrates and the fabrication of state-of-the-art detectors and focal plane arrays (FPAs). Array formats of up to 2048 × 2048 and unit cells as small as 20 m have been made. Weregularly measure response operability values in excess of 99% on these arrays. These values typically exceed expectations, with the number of outages corresponding to as-grown defect densities four times lower than what we measure. We have investigated this operability discrepancy and now can account for it. Comparisons of measured properties were used to establish trends between defect occurrence and pixel operability. These correlations show that a combination of defect removal and low-impact defects provide the explanation. Having this knowledge will allow for better operability predictions and assist in efforts to reduce defect impact on FPA performance.
Document Type: Research Article
Publication date: July 1, 2003