Palladium as a contact material for InSb semiconductors—The In-Pd-Sb phase diagram
Authors: Luef, Christoph; Flandorfer, Hans; Richter, Klaus; Ipser, Herbert
Source: Journal of Electronic Materials, Volume 32, Number 2, February 2003 , pp. 43-51(9)
Abstract:The ternary In-Pd-Sb phase diagram was investigated in the compositional range up to approximately 60at.%Pd, covering the phase relationships of the compound semiconductor InSb. The investigation included differential thermal analyses (DTA), x-ray powder diffraction, and electron probe microanalyses (EPMA). The ternary equilibrium phase relations were studied for three isothermal sections at 300°C, 450°C, and 700°C, respectively. Nine invariant ternary-phase reactions were identified in the temperature range 150-750°C. A complete reaction scheme was constructed in the corresponding composition range, and the liquidus surface was derived from DTA data. In addition, six isopleths were constructed from the combined data.
Document Type: Research article
Publication date: 2003-02-01