Palladium as a contact material for InSb semiconductors—The In-Pd-Sb phase diagram

Authors: Luef, Christoph; Flandorfer, Hans; Richter, Klaus; Ipser, Herbert

Source: Journal of Electronic Materials, Volume 32, Number 2, February 2003 , pp. 43-51(9)

Publisher: Springer

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Abstract:

The ternary In-Pd-Sb phase diagram was investigated in the compositional range up to approximately 60at.%Pd, covering the phase relationships of the compound semiconductor InSb. The investigation included differential thermal analyses (DTA), x-ray powder diffraction, and electron probe microanalyses (EPMA). The ternary equilibrium phase relations were studied for three isothermal sections at 300°C, 450°C, and 700°C, respectively. Nine invariant ternary-phase reactions were identified in the temperature range 150-750°C. A complete reaction scheme was constructed in the corresponding composition range, and the liquidus surface was derived from DTA data. In addition, six isopleths were constructed from the combined data.

Keywords: Phase diagram; In-Pd-Sb system; indium antimonide; palladium alloys; antimony alloys; thermal analysis; x-ray diffraction; electron probe microanalysis

Document Type: Research article

DOI: http://dx.doi.org/10.1007/s11664-003-0236-6

Affiliations: 1: Email: Christoph.Luef@univie.ac.at

Publication date: 2003-02-01