Lattice-mismatched InGaAs layers grown by OMVPE on GaAs based compliant substrates
Authors: Vanhollebeke, K.; Moerman, I.; Daele, P.; Demeester, P.
Source: Journal of Electronic Materials, Volume 29, Number 7, July 2000 , pp. 933-939(7)
Abstract:Thin GaAs compliant substrates have been developed in order to reduce the strain in lattice-mismatched layers during epitaxial overgrowth. Using OMVPE a variety of (30–80Å) thin GaAs layers were grown and successfully fused at 660°C on a host GaAs substrate with twist-angles between 10° and 45°. The resulting compliant substrates were overgrown with up to 3.6% lattice-mismatched and 1200 nm thick InGaAs layers. Nomarski phase contrast microscopy, photoluminescence and x-ray diffraction (XRD) were used to characterize the heteroepitaxial layers. The smooth and cross-hatch free morphology and the reduced DXRD peakwidth of the heteroepitaxial layers indicate a substantial improvement of the quality of heteroepitaxial material using compliant substrates.
Document Type: Research Article
Affiliations: Email: firstname.lastname@example.org
Publication date: July 1, 2000