Surface and interface stress effects on the growth of thin films

Author: Cammarata, R.

Source: Journal of Electronic Materials, Volume 26, Number 9, September 1997 , pp. 966-968(3)

Publisher: Springer

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Abstract:

Surface and interface stresses represent the work per unit area to stretch the surface of a solid. These types of stresses are discussed, emphasizing their relevance to thin film growth. In particular, the influence of these parameters on the critical thickness for epitaxy and for intrinsic thin film stress generation are considered.

Keywords: Critical thickness; interface stress; surface stress; thin film

Document Type: Research article

DOI: http://dx.doi.org/10.1007/s11664-997-0232-3

Publication date: 1997-09-01